发明名称 剥離起点作成装置及び方法
摘要 The present invention provides a separation origin production device capable of detecting the position of a blade edge of a knife relative to a knife insertion position without tilting the knife, allowing the knife to be inserted precisely. The present invention provides a separation origin production device provided with a movement means for inserting a knife between a first substrate and a second substrate of a layered body, a position detection means for detecting the position of a blade edge of the knife and the position of a second main surface of the second substrate, and a position adjustment means for adjusting the positions of the layered body and the knife.
申请公布号 JP6070968(B2) 申请公布日期 2017.02.01
申请号 JP20150525163 申请日期 2014.06.24
申请人 旭硝子株式会社 发明人 滝内 圭;伊藤 泰則;宇津木 洋
分类号 H01L21/02;G01B11/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址