MONOLITHIC SEPARATION MEMBRANE STRUCTURE, METHOD FOR PRODUCING MONOLITHIC SEPARATION MEMBRANE STRUCTURE, AND METHOD FOR DEHYDRATING SAME

摘要

A monolithic separation membrane structure (100) comprises a support body (211) and a separation membrane (300). The support body (211) is composed of a porous material and includes a plurality of through holes (TH1). The separation membrane (300) is formed in a tubular shape on an inner side of the plurality of through holes (TH1), and is used in a penetrative vaporization method or a vapor infiltration method. The helium gas permeation resistance in the support body (211) is less than 8.3 x 10 7 Pa €¢ sec/m 2 .