发明名称 急冷チャンバ、凝縮装置及び冷却方法
摘要 A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.
申请公布号 JP6069454(B2) 申请公布日期 2017.02.01
申请号 JP20150204297 申请日期 2015.10.16
申请人 エスディーシーマテリアルズ, インコーポレイテッド 发明人 ビーバーガー、マクシミリアン、エー.;レイマン、フレデリック、ピー.
分类号 B01J19/00;B01J19/08 主分类号 B01J19/00
代理机构 代理人
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