| 摘要 |
Provided is an electrostatic chuck device that has superior dechucking characteristics and is able to resolve problems stemming from residual charge during workpiece separation from the electrostatic chuck and furthermore, problems stemming from turning the power source on or off. The electrostatic chuck device is provided with: an electrostatic chuck; a DC power source for the electrostatic chuck; and a variable capacitance means connected in series between the electrostatic chuck and the DC power source. The electrostatic chuck device has superior dechucking characteristics of, in the state of imposing voltage on the electrostatic chuck, by means of changing the capacitance of the variable capacitance means, changing the amount of charge of the electrostatic charge between a high value when chucking the workpiece and a low value when dechucking the workpiece. |
