发明名称 半導体モジュールとその製造方法
摘要 A semiconductor module of the present invention includes: a semiconductor element having a first main surface and a second main surface facing the first main surface, the semiconductor element including a front surface electrode and a back surface electrode on the first main surface and the second main surface, respectively; a metal plate electrically connected to the back surface electrode of the semiconductor element through a sintered bonding material including metal nanoparticles; and a plate-shaped conductor electrically connected to the front surface electrode of the semiconductor element through the sintered bonding material including the metal nanoparticles. The metal plate and the conductor include grooves communicating between a bonding region bonded to the semiconductor element and the outside of the bonding region.
申请公布号 JP6072667(B2) 申请公布日期 2017.02.01
申请号 JP20130233902 申请日期 2013.11.12
申请人 三菱電機株式会社 发明人 日野 泰成
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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