| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology that enables making a distance of separation of a long substrate from an outer peripheral surface of a can roll substantially uniform along a circumferential direction of the outer peripheral surface.SOLUTION: A can roll for cooling a long resin film transferred by a roll-to-roll process in a vacuum chamber by winding on its outer peripheral surface in which a plurality of gas introduction paths 24 each having a plurality of gas releasing holes 25 opened to the side of the outer peripheral surface are arranged along the whole circumference at substantially regular intervals along the circumferential direction. Gas is supplied from outside of the vacuum chamber to each gas introduction path 24 via a plurality of gas supply lines 33, 43 in parallel relation to each other and each having valves 35, 45. |
