发明名称 拡散素子、照明光学系および計測装置
摘要 PROBLEM TO BE SOLVED: To efficiently and uniformly radiate light to a predetermined projection range without enlarging an illumination optical system.SOLUTION: The diffusion element of the present invention includes an uneven pattern layer as a layer including a structure for adding a phase difference to incident light. The uneven pattern layer has a phase distribution in which different diffusion lights are radiated when a region within an effective diameter of the incident light to the diffusion element is divided into two or more regions and light is emitted to each region. In the uneven pattern layer, basic units each of which, in receiving light, radiates the diffusion light into an outgoing radiation angle range are arranged. The arrangement may include two or more basic units having at least different unit sizes or phase distributions.
申请公布号 JP6070274(B2) 申请公布日期 2017.02.01
申请号 JP20130039434 申请日期 2013.02.28
申请人 旭硝子株式会社 发明人 宮坂 浩司
分类号 G02B5/02;G01B11/25;G01C3/06;G02B5/18;G02B5/30;G02B27/44 主分类号 G02B5/02
代理机构 代理人
主权项
地址