| 摘要 |
PROBLEM TO BE SOLVED: To provide a dimension measurement device capable of measuring the dimension of a measuring object with high accuracy.SOLUTION: Low coherence light of its center wavelength being in a UV region is emitted from a low coherence light source 12. The low coherence light emitted from the low coherence light source 12 is split into measuring light and reference light by a beam splitter 18. The measuring light is periodically deflected by a polygon mirror 30 to be emitted to the measuring object through a f&thetas; lens 32. In this manner, the measuring light can be incident perpendicularly on a surface of the measuring object O, a resolution of the measuring light direction can be enhanced by decreasing wavelength, and a resolution of the direction perpendicular to the measuring light can be enhanced by microminiaturization of a measuring light size. |
