| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser drawing device which uses raster scan and can obtain uniform pattern.SOLUTION: A laser drawing device possesses: a laser beam emission unit 3 emitting laser beam; a move system moving the laser beam emission unit 3 to an X direction; a sweep system which makes laser beam emit while sweeping to a Y direction based on a drawing pattern; a system sending a drawn substrate 10 to the Y direction; and a control unit 5 controlling the move system and the sweep system respectively. The control unit makes the systems perform multiplex drawing for n times based on the drawing pattern, and each drawing is performed with a starting point of scanning shifting to the Y direction by Y/n. The Yis a sweep length of the Y direction, and n is a drawing count and a natural number not less than 2. |
