发明名称 微小ボール搭載ワークのリペア装置
摘要 PROBLEM TO BE SOLVED: To provide a repair device quickly acquiring fine positional information on a mounting mistake, and using correction means to correct the mounting mistake on the basis of the detailed positional information, and capable of accurately repairing even a work in which micro-balls are arranged at narrow intervals.SOLUTION: A repair device 1 for a micro-ball mounted work includes: mounting mistake inspection means having first inspection means for acquiring first approximate position information on a mounting mistake, and second inspection means for, on the basis of the first approximate position information acquired by the first inspection means, acquiring second detailed position information from a prescribed area image including the mounting mistake detected by the first inspection means; and correction means for correcting the mounting mistake on the basis of the second detailed position information acquired by the second inspection means.
申请公布号 JP6069723(B2) 申请公布日期 2017.02.01
申请号 JP20120128542 申请日期 2012.06.06
申请人 澁谷工業株式会社 发明人 渡辺 大輔;扇田 政和;池田 和生;石崎 康隆;大堺 智司
分类号 H01L21/60;B23K1/00;B23K3/06;G01B11/00;H05K3/34 主分类号 H01L21/60
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