发明名称 SELF ALIGNED AND SCALABLE NANOGAP POST PROCESSING FOR DNA SEQUENCING
摘要 An apparatus including a circuit substrate including a contact in a metal layer; and a transducer including a first electrode deposited on and coupled to a sidewall of the contact and a second electrode coupled to a conductor through which voltage can be applied, wherein the second electrode includes a profile aligned to the sidewall of the contact and separated from the first electrode by a gap. A method including forming a transducer adjacent a contact in a metal layer on a substrate, the transducer including a first electrode disposed on a sidewall of the contact and a second electrode coupled to a conductor through which voltage can be applied, wherein the second electrode includes a profile aligned to the sidewall of the contact and separated from the first electrode by a gap.
申请公布号 EP3122895(A1) 申请公布日期 2017.02.01
申请号 EP20140886751 申请日期 2014.03.28
申请人 Intel Corporation 发明人 ELIBOL, Oguz H.
分类号 C12Q1/68;G01N33/48 主分类号 C12Q1/68
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