Tape sticking apparatus

摘要

A tape sticking apparatus includes a rubber sheet that partitions an airtight space formed above a chamber into first and second airtight spaces and, a tape frame that holds a tape above the rubber sheet, and a supply/exhaust mechanism that switches between pressurizing and depressurizing by supplying gas to or sucking gas from the first and second airtight spaces. The gas supply/exhaust mechanism includes a first flow-rate control valve that controls the flow rate of sucked gas when the first airtight space is depressurized, and a second flow-rate control valve that controls the flow rate of supplied when the first airtight space is pressurized.

主权项

1. A tape sticking apparatus, comprising:
a vessel with an airtight space formed therein; an elastic sheet that partitions the airtight space into an upper-located first airtight space and a lower-located second airtight space, a tape sticking target object being placed in the first airtight space side; a tape hold member that holds a tape inside the first airtight space and positions the tape a predetermined distance away from the tape sticking target object placed on the elastic sheet; and an air-pressure switching member for switching between pressurizing and depressurizing by supplying or sucking gas to or from the first and second airtight spaces; a first supply/exhaust pipe that supplies air to the first airtight space and sucks air from the first airtight space; a second supply/exhaust pipe that supplies air to the second airtight space and sucks air from the second airtight space; and a plurality of spacers having a predetermined height and being formed on a top surface of a lower vessel of the vessel in the second airtight space located below the elastic sheet, wherein the first and second supply/exhaust pipes are laid inside the lower vessel, wherein the spacers are arranged around a mouth of the second supply/exhaust pipe, wherein, the tape sticking apparatus is configured that, after the first and second airtight spaces are depressurized and thereby evacuated, the tape sticking target object is stuck on the tape by pressurizing the second airtight space, inflating the elastic sheet, and pushing the tape sticking target object upward, and the elastic sheet is deflated by pressurizing the first airtight space, wherein the air-pressure switching member comprises:
a first flow-rate controller which, when gas is sucked from the first airtight space, controls a flow rate of the gas; anda second flow-rate controller which, when gas is supplied to the first airtight space, controls a flow rate of the gas, and wherein, when the first airtight space is depressurized, the gas is sucked from the first airtight space while controlling its flow rate by using the first flow-rate controller, and when the first airtight space is pressurized, the gas is supplied to the first airtight space while controlling its flow rate by using the second flow-rate controller.