发明名称 Terahertz material evaluation and characterization via material difference frequency generation
摘要 Methods, systems and apparatuses are disclosed for interrogating characteristics of a substrate material surface and sub-surface by evaluating Terahertz output signals generated by non-Terahertz, optical source inputs.
申请公布号 US9557263(B2) 申请公布日期 2017.01.31
申请号 US201414520694 申请日期 2014.10.22
申请人 THE BOEING COMPANY 发明人 Hunt Jeffrey H.;Belk John H.
分类号 G01N21/35;G01N21/3581;G01N21/39;G01N21/3586 主分类号 G01N21/35
代理机构 代理人
主权项 1. A method for evaluating a substrate material surface comprising: directing a first optical input beam from a first optical source having a first frequency onto a region of a substrate material surface; directing a second optical input beam from a second optical source having a second frequency onto the region of the substrate material surface, with the first frequency of the first optical input beam differing from the second frequency of the second optical input beam; mixing the first optical input beam and the second optical input beam reflected from the substrate material surface to provide an output beam having a Terahertz frequency; receiving the output beam with a Terahertz detector; and measuring one or more properties of the substrate material surface based on the output beam received by the detector.
地址 Chicago IL US