Semiconductor device

摘要

A semiconductor device includes a plurality of epitaxial layers stacked over a supportive substrate, a first buried impurity region formed to share the supportive substrate with a lowermost epitaxial layer among the multiple epitaxial layers, one or more second buried impurity regions formed to be coupled with the first buried impurity region and share an Nth epitaxial layer and an (N+1)th epitaxial layer among the multiple epitaxial layers, where N is a natural number, a body region formed in an uppermost epitaxial layer among the multiple epitaxial layers and a deep well formed in the uppermost epitaxial layer to surround the body region and to be coupled with the second buried impurity regions that share the uppermost epitaxial layer.

主权项

1. A method for fabricating a semiconductor device, comprising:
ion-implanting an impurity into a substrate; forming a first epitaxial layer over the substrate and a first buried impurity region between the first epitaxial layer and the substrate by activating the impurity ion-implanted into the substrate; ion-implanting an impurity into the first epitaxial layer at a border contacting the first buried impurity region; forming a second epitaxial layer over the first epitaxial layer and a second buried impurity region, which contacts the first buried impurity region, between the second epitaxial layer and the first epitaxial layer by activating the impurity ion-implanted into the first epitaxial layer; and forming a deep well that contacts the second buried impurity region in the second epitaxial layer, wherein the first epitaxial layer has a higher impurity doping concentration than that of the second epitaxial layer.