发明名称 |
Silicided nanowires for nanobridge weak links |
摘要 |
Silicided nanowires as nanobridges in Josephson junctions. A superconducting silicided nanowire is used as a weak-link bridge in a Josephson junction, and a fabrication process is employed to produce silicided nanowires that includes patterning two junction banks and a rough nanowire from a silicon substrate, reshaping the nanowire through hydrogen annealing, and siliciding the nanowire by introduction of a metal into the nanowire structure. |
申请公布号 |
US9559284(B2) |
申请公布日期 |
2017.01.31 |
申请号 |
US201514659749 |
申请日期 |
2015.03.17 |
申请人 |
GLOBALFOUNDRIES INC. |
发明人 |
Chang Josephine B.;Chang Paul;Cohen Guy M.;Guillorn Michael A. |
分类号 |
B05D5/12;H01L39/02;H01L39/22;H01L39/24 |
主分类号 |
B05D5/12 |
代理机构 |
Hoffman Warnick LLC |
代理人 |
Canale Anthony;Hoffman Warnick LLC |
主权项 |
1. A method for forming a superconducting weak-link junction, the method comprising:
patterning a first junction bank, a second junction bank, and a rough nanowire from a silicon substrate; reshaping the nanowire through hydrogen annealing; and siliciding the nanowire by introduction of a metal into the nanowire, wherein the nanowire is at least one of shaped, sized, structured, located or connected to form a weak-link bridge between the first junction bank and the second junction bank. |
地址 |
Grand Cayman KY |