发明名称 Silicided nanowires for nanobridge weak links
摘要 Silicided nanowires as nanobridges in Josephson junctions. A superconducting silicided nanowire is used as a weak-link bridge in a Josephson junction, and a fabrication process is employed to produce silicided nanowires that includes patterning two junction banks and a rough nanowire from a silicon substrate, reshaping the nanowire through hydrogen annealing, and siliciding the nanowire by introduction of a metal into the nanowire structure.
申请公布号 US9559284(B2) 申请公布日期 2017.01.31
申请号 US201514659749 申请日期 2015.03.17
申请人 GLOBALFOUNDRIES INC. 发明人 Chang Josephine B.;Chang Paul;Cohen Guy M.;Guillorn Michael A.
分类号 B05D5/12;H01L39/02;H01L39/22;H01L39/24 主分类号 B05D5/12
代理机构 Hoffman Warnick LLC 代理人 Canale Anthony;Hoffman Warnick LLC
主权项 1. A method for forming a superconducting weak-link junction, the method comprising: patterning a first junction bank, a second junction bank, and a rough nanowire from a silicon substrate; reshaping the nanowire through hydrogen annealing; and siliciding the nanowire by introduction of a metal into the nanowire, wherein the nanowire is at least one of shaped, sized, structured, located or connected to form a weak-link bridge between the first junction bank and the second junction bank.
地址 Grand Cayman KY