Method and tool to reverse the charges in anti-reflection films used for solar cell applications

摘要

A method is provided for making a solar cell. The method includes providing a stack including a substrate, a barrier layer disposed on the substrate, and an anti-reflective layer disposed on the barrier layer, where the anti-reflective layer has charge centers. The method also includes generating a corona with a charging tool and contacting the anti-reflective layer with the corona thereby injecting charge into at least some of the charge centers in the anti-reflective layer. Ultra-violet illumination and temperature-based annealing may be used to modify the charge of the anti-reflective layer.

主权项

1. A method for making a solar cell, the method comprising:
(a) providing a stack including a substrate, a barrier layer disposed on the substrate, and an anti-reflective layer disposed on the barrier layer, the anti-reflective layer having charge centers; (b) generating a corona with a charging tool; and (c) contacting the anti-reflective layer with the corona thereby injecting charge into at least some of the charge centers in the anti-reflective layer, wherein the charge is uniformly distributed throughout the anti-reflective layer; and wherein a thickness of the barrier layer is sufficient to prevent electron tunneling from the substrate to the anti-reflective layer without negating effects of the introduced charge in the antireflective layer.