Method and apparatus for an integrated capacitor

摘要

An integrated capacitor can be fabricated with both electrodes formed by trenches for low resistance. According to one embodiment, the capacitor can comprise a first trench electrode, one or more dielectric layers, and a second trench electrode. The first trench electrode and the second trench electrode can be fabricated in different trenches to improve capacitance density and resistance of the integrated capacitor.

主权项

1. An apparatus, comprising:
a substrate comprising a dielectric layer; a first electrode comprising a conductive material formed in a first trench of the substrate, wherein the dielectric layer is situated between the first electrode and the substrate; and a second electrode comprising the conductive material formed in a second trench of the substrate, wherein the dielectric layer is situated between the second electrode and the substrate, resulting in a section of the substrate being situated between the dielectric layer of the first trench and the second trench.