| 主权项 |
1. A vacuum chuck for holding and positioning wafers, comprising:
a supporting assembly having a receiving groove and at least one first vacuum aperture defined in the receiving groove, a seal unit including a seal ring bulging to form a vacuum trough, the seal ring fixed in the receiving groove of the supporting assembly and having at least one second vacuum aperture communicating with the first vacuum aperture, the seal unit further comprising a pair of fixing rings, either of the fixing rings has at least one vacuum aperture corresponding to the second vacuum aperture of the seal ring, one of the fixing rings is disposed in the vacuum trough, the pair of fixing rings and the seal ring are fixed together, which is further fixed in the receiving groove of the supporting assembly, the seal ring is disposed between the pair of fixing rings, a chuck connector fastened with the supporting assembly and having at least one vacuum port and at least one vacuum orifice communicating with the vacuum port, and at least one vacuum hose connecting the first vacuum aperture, the second vacuum aperture with the vacuum orifice and the vacuum port of the chuck connector for evacuating the air in the vacuum trough to hold and position a wafer on the seal ring and the supporting assembly. |
