主权项 |
1. An ultrasonic device comprising:
a substrate having a plurality of openings arranged in an array pattern; a first high-frequency ultrasonic element line to a n-th high-frequency ultrasonic element line, where n is an integer of more than 2, in which a plurality of ultrasonic elements having a resonance characteristic of a first frequency being arranged along a first direction in each high-frequency ultrasonic element line; a first low-frequency ultrasonic element line to a n-th low-frequency ultrasonic element line in which a plurality of ultrasonic elements having a resonance characteristic of a second frequency, which is lower than the first frequency, being arranged along a first direction in each low-frequency ultrasonic element line; a first high-frequency drive electrode wire to a n-th high-frequency drive electrode wire being arranged along the first direction; a first low-frequency drive electrode wire to a n-th low-frequency drive electrode wire being arranged along the first direction; a plurality of common electrode wires being arranged along a second direction which intersects with the first direction; a first electrode, which is placed in each of the plurality of ultrasonic elements configuring an i-th high-frequency ultrasonic element line, where i is an integer of 1 or larger and n or smaller, among the first high-frequency ultrasonic element line to the n-th high-frequency ultrasonic element line, being connected to an i-th high-frequency drive electrode wire among the first high-frequency drive electrode wire to the n-th high-frequency drive electrode wire; a second electrode, which is placed in each of the plurality of ultrasonic elements configuring the i-th high-frequency ultrasonic element line, being connected to any one of the plurality of common electrode wires; a third electrode, which is placed in each of the plurality of ultrasonic elements configuring a j-th low-frequency ultrasonic element line, where j is an integer of 1 or large and n or smaller, among the first low-frequency ultrasonic element line to the n-th low-frequency ultrasonic element line, being connected to a j-th low-frequency drive electrode wire among the first low-frequency drive electrode wire to the n-th low-frequency drive electrode wire; and a fourth electrode, which is placed in each of the plurality of ultrasonic elements configuring the j-th low-frequency ultrasonic element line, being connected to any of the plurality of common electric wires, the first high-frequency ultrasonic element line to the n-th high-frequency ultrasonic element line being arranged along the second direction, the first low-frequency ultrasonic element line to the n-th low-frequency ultrasonic element line being arranged along the second direction, each ultrasonic element of the plurality of the ultrasonic elements provided in each opening of the plurality of openings having a vibrating membrane that covers the opening, and a piezo element part being provided on the vibrating membrane, a length in a shorter side of the opening, in which the ultrasonic element having a resonance characteristic of the first frequency is provided, being shorter than a length in a shorter side of the opening, in which the ultrasonic element having a resonance characteristic of the second frequency is provided. |