Method and arrangement for operating a dynamic nano focusing system

摘要

The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement.

主权项

1. A dynamic nanofocusing system so as to realize desired adjusting distances for focusing for the use thereof in the field of microscopy, interferometry or similar applications, the nanofocusing system comprising:
a lever-transmitted coarse-adjustment piezo actuator and a frictionless guide based on an elastically deformable solid-body joint which is connected to a receiving unit that carries a body to be moved having a mass so as to realize the desired adjusting distances for the focusing; a first and a second tubular piezo shear actuator which are fixed to the receiving unit which is driven by the lever-transmitted coarse-adjustment piezo actuator; and a compensation mass; wherein the first tubular piezo shear actuator is, for its part, connected to the body to be moved and the second tubular piezo shear actuator is connected to the compensation mass.