Integrated magnetometer and its manufacturing process

摘要

Integrated magnetometer comprising a plurality of multilayer magnetoresistive sensors deposited on a surface, called the top surface, of a substantially planar substrate, characterized in that said top surface of the substrate has at least one cavity or protuberance provided with a plurality of inclined faces, and in that at least four said magnetoresistive sensors are placed on four said magnetoresistive sensors are placed on four said inclined faces, having different orientations and opposite one another in pairs, each sensor being sensitive to one component of an external magnetic field parallel to that face on which it is placed. Process for manufacturing such a magnetometer.

主权项

1. An integrated magnetometer comprising a plurality of multilayer magnetoresistive sensors (R1, R2, R3, R4) deposited on a top surface of a substantially planar substrate (2), wherein:
said top surface of the substrate presents at least one cavity or projection (P, CP) having a plurality of inclined faces; at least four of said multilayer magnetoresistive sensors are deposited on four of said inclined faces of the at least one cavity or projection, said magnetoresistive sensors presenting four different orientations opposite in pairs, each sensor being sensitive to an external magnetic field component that is parallel to the face on which it is deposited; said or each cavity or projection presents the shape of a pyramid or a truncated pyramid, having a base which is square or rectangular; and the sensitivity axes (AR1, AR2, AR3, AR4) of said sensors are directed towards or away from the tip of said pyramid.