Multi-laminate hermetic barriers and related structures and methods of hermetic sealing

摘要

A free-standing multi-laminate hermetic sheet includes a first carrier film, a hermetic inorganic thin film formed over the first carrier film, and a second carrier film formed over the hermetic inorganic thin film. A workpiece can be hermetically sealed using the multi-laminate sheet, which can be applied to the workpiece in a step separate from a formation step of either the multi-laminate sheet or the workpiece.

主权项

1. A protected substrate comprising:
an hermetic structure formed over a major surface of a substrate, wherein the hermetic structure comprises a barrier layer in direct physical contact with a film, wherein the barrier layer comprises a glass material selected from the group consisting of a tin fluorophosphate glass, a tungsten-doped tin fluorophosphate glass, a chalcogenide glass, a tellurite glass, and a borate glass and the film comprises a polymer layer, wherein the tin fluorophosphate glass comprises 20-85 wt % Sn, 2-20 wt % P, 10-36 wt % O, 10-36 wt % F, 0-5 wt % Nb, and at least 75 wt % total of Sn+P+0+F, and wherein the tungsten-doped tin fluorophosphate glass comprises 55-75 wt % Sn, 4-14 wt % P, 6-24 wt % O, 4-22 wt % F, and 0.15-15 wt % W.