Integrated laser vibrometer MEMS micro-shell gyroscope

摘要

A gyroscope including a dielectric resonator, a laser vibrometer on a first side of the dielectric resonator, and a laser dump for redirecting or absorbing light received at the laser dump from the laser vibrometer, the laser dump on a second side of the dielectric resonator. A first distance between the dielectric resonator and the laser vibrometer ranges from 10 nm to 20 μm, and a second distance between the dielectric resonator and the laser dump ranges from 10 nm to 20 μm.

主权项

1. A gyroscope comprising:
a dielectric resonator, wherein the dielectric resonator is a micro-shell; a laser vibrometer near a first side of the micro-shell, wherein the first side is outside the micro-shell; and a laser dump near a second side of the micro-shell, wherein the second side is inside the micro-shell; wherein the laser vibrometer and the laser dump are aligned to one another so that light transmitted by the laser vibrometer to the micro-shell and passing through the micro-shell from the outside to the inside is absorbed by the laser dump.