Solar cell emitter region fabrication using silicon nano-particles

摘要

Methods of fabricating solar cell emitter regions using silicon nano-particles and the resulting solar cells are described. In an example, a method of fabricating an emitter region of a solar cell includes forming a region of doped silicon nano-particles above a dielectric layer disposed above a surface of a substrate of the solar cell. A layer of silicon is formed on the region of doped silicon nano-particles. At least a portion of the layer of silicon is mixed with at least a portion of the region of doped silicon nano-particles to form a doped polycrystalline silicon layer disposed on the dielectric layer.

主权项

1. A method of fabricating an emitter region of a solar cell, the method comprising:
forming a region of doped nano-particles above a dielectric layer disposed above a surface of a substrate of the solar cell; forming a layer of semiconductor material on the region of doped nano-particles, wherein forming the layer of semiconductor material comprises forming a layer of un-doped, intrinsic, or lightly doped amorphous semiconductor material in a low pressure chemical vapor deposition (LPCVD) chamber at a temperature approximately in the range of 525-565 degrees Celsius; and mixing at least a portion of the layer of semiconductor material with at least a portion of the region of doped nano-particles to form a doped polycrystalline semiconductor material layer disposed on the dielectric layer.