| 发明名称 | Material handling with dedicated automated material handling system | ||
| 摘要 | An apparatus includes a dedicated material handling module having a dedicated automated material handling system (AMHS) defines a transport route between a first tool and a second tool selected from a plurality of tools in a fabrication facility. The dedicated AMHS is configured to transport wafer carriers between the first tool and the second tool or vice versa independent of a fabrication facility AMHS that is configured to transport wafer carriers among the plurality of tools. | ||
| 申请公布号 | US9558978(B2) | 申请公布日期 | 2017.01.31 |
| 申请号 | US201313874764 | 申请日期 | 2013.05.01 |
| 申请人 | KLA-TENCOR CORPORATION | 发明人 | Widmann Amir;Adel Michael;Sekula Pati |
| 分类号 | H01L21/677 | 主分类号 | H01L21/677 |
| 代理机构 | JDI Patent | 代理人 | Isenberg Joshua D.;JDI Patent |
| 主权项 | 1. A material handling apparatus, comprising: a dedicated material handling module having a dedicated automated material handling system (AMHS) that defines a transport route between a first tool and a second tool selected from a plurality of tools in a fabrication facility, wherein the plurality includes more tools than just the first and second tools, wherein the dedicated AMHS is configured to transport wafer carriers between the first tool and the second tool or vice versa independent of a fabrication facility AMHS that is configured to transport the wafer carriers among the plurality of tools, wherein the wafer carriers are front opening unified pods (FOUPs). | ||
| 地址 | Milpitas CA US | ||