Method for analyzing and/or processing an object as well as a particle beam device for carrying out the method

摘要

The application relates to a method for analyzing, in particular for imaging, and/or processing of an object as well as a particle beam device for carrying out this method. In particular, the particle beam device of this application is an electron beam device and/or an ion beam device. The method in particular comprises the control unit providing a first control parameter, wherein a beam guiding unit is controlled using the first control parameter for guiding the particle beam and/or wherein a moving unit is controlled using the first control parameter for moving an object holder, correlating a position of the object holder in a second coordinate system to the object position on the surface of the object, identifying a first coordinate transformation between the first coordinate system and the second coordinate system, identifying an orientation position of a distinctive feature on the surface of the object and identifying first coordinates of the orientation position in the first coordinate system, the control unit providing a second control parameter, wherein the second control parameter is used for at least one of: controlling the beam guiding unit for guiding the particle beam, controlling the moving unit for moving the object holder or controlling a detector, identifying again the orientation position of the distinctive feature and identifying second coordinates of the orientation position in the first coordinate system, comparing the first coordinates with the second coordinates, identifying a local displacement of the first coordinates to the second coordinates, identifying a second coordinate transformation using the first coordinate transformation and the local displacement and identifying a position of an area to be analyzed and/or processed on the surface of the object.

主权项

1. A method for analyzing and/or processing an object using a particle beam device, wherein the particle beam device comprises at least one movable object holder for arranging the object in the particle beam device, at least one moving unit for moving the object holder, a first beam column operated in a first operation mode and comprising a first beam generator for generating a first particle beam comprising first charged particles, a second beam column operated in a second operation mode and comprising a second beam generator for generating a second particle beam comprising second charged particles, the second operation mode being different than the first operation mode, at least one beam guiding unit for guiding the first particle beam and the second particle beam to the object, at least one control unit for controlling the beam guiding unit and/or for controlling the moving unit for moving the object holder, and at least one detector for detecting at least one of: interaction particles or interaction radiation which are generated when the first or second particle beam impinges on the object, the method comprising:
the control unit providing a first control parameter, wherein the beam guiding unit is controlled using the first control parameter for guiding the first particle beam and wherein in the first operation mode, only the first particle beam and the first control parameter are used; identifying object coordinates of at least one registration position on a surface of the object in a first coordinate system; correlating a position of the object holder in a second coordinate system to the registration position on the surface of the object, wherein the position of the object holder is given by holder coordinates in the second coordinate system; identifying a first coordinate transformation between the first coordinate system and the second coordinate system using the coordinates of the registration position and the holder coordinates of the position of the object holder; identifying a distinctive feature on the surface of the object and identifying first coordinates of the distinctive feature in the first coordinate system; the control unit providing a second control parameter, wherein the second control parameter is used for controlling the beam guiding unit for guiding the second particle beam and wherein in the second operation mode, only the second particle beam and the second control parameter are used; identifying again the distinctive feature after the control unit has provided the second control parameter and identifying second coordinates of the distinctive feature in the first coordinate system; comparing the first coordinates with the second coordinates; identifying a local displacement of the first coordinates to the second coordinates, identifying a second coordinate transformation using the first coordinate transformation and the local displacement, wherein the second coordinate transformation allows for any local displacement in an area to be analyzed and/or processed on the surface of the object; identifying a position of the area to be analyzed and/or processed on the surface of the object by using the second coordinate transformation; and at least one of: guiding the first or second particle beam or moving the object holder using the moving unit to the position of the area to be analyzed and/or processed.