Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium

摘要

A liquid immersion exposure apparatus includes a projection system having a final element and a liquid immersion member that forms a liquid immersion space under the final element. The liquid immersion member includes a first member that surrounds the final element and that has a liquid supply port and a liquid suction port and a second member at least a portion of which is disposed below the first member, and that is movable with respect to the first member. The first member has a channel therein, one end of the channel is open to a first space between the final element and the first member, the other end of the channel is disposed below the one end and is open to a second space different from the first space, and the channel is provided such that liquid is allowed to flow into the channel.

主权项

1. A liquid immersion exposure apparatus comprising:
a projection system having a final element; a liquid immersion member that forms a liquid immersion space under the final element, wherein: the liquid immersion member includes a first member that surrounds the final element and that has a liquid supply port and a liquid suction port; the liquid immersion member includes a second member, at least a portion of which is disposed below the first member, and that is movable with respect to the first member; the first member has a channel therein; one end of the channel is open to a first space between the projection system and the liquid immersion member; an other end of the channel is disposed below the one end and is open to a second space different from the first space; and the channel is provided such that liquid is allowed to flow into the channel.