Optical projection system

摘要

An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.

主权项

1. An optical projection system having a light path, the optical projection system comprising:
a first lens unit configured to receive a first part of the light path; a second lens unit configured to receive a second part of the light path; a support unit supporting the first and second lens units, wherein:
the first lens unit is an elongated lens unit comprising a plurality of lenses;the second lens unit is an elongated lens unit comprising a plurality of lenses;the support unit comprises a housing receiving a third part of the light path and enclosing a reflective element;the housing comprises a first interface, a second interface and an internal support interface;the first interface supports the first lens unit;the second interface supports the second lens unit;the internal support interface is located internal to the housing;the internal support interface supports the reflective element internal to the housing; andthe optical projection system is a microlithography optical projection system.