Raw material gas supply apparatus for semiconductor manufacturing equipment

摘要

A raw material gas supply apparatus includes a liquid raw material gas supply source, a source tank storing liquid raw material, a gas distribution passage through which raw material gas comprising steam of the liquid raw material is supplied to a process chamber from the source tank, an automatic pressure regulator installed on an upstream side of the gas passage, wherein the automatic pressure regulator keeps supply pressure of the raw material gas at a set value, a supply gas switching valve installed on a downstream side of the gas passage, wherein this valve opens and closes the gas passage, an orifice provided on at least one of an inlet side or outlet side of the valve, wherein the orifice regulates flow rate of the raw material gas, and a constant temperature heating device heats the source tank, the gas passage, the valve and the orifice to a set temperature.

主权项

1. A raw material gas supply apparatus for semiconductor manufacturing equipment comprising:
(a) a liquid raw material supply source; (b) a source tank that stores liquid raw material supplied by the liquid raw material supply source through a liquid raw material flow rate meter and a liquid raw material supply valve; (c) a first gas distribution passage through which a raw material gas passes to a process chamber, wherein the raw material gas is steam of the liquid raw material that is supplied from an internal upper space portion of the source tank; (d) an automatic pressure regulator installed on an upstream side of the first gas distribution passage, wherein the automatic pressure regulator keeps a supply pressure of the raw material gas that is supplied to the process chamber at a set pressure value, wherein the automatic pressure regulator comprising, i. a control valve; ii. a gas pressure detector and a gas temperature detector provided on the downstream side of the control valve; iii. a temperature correction circuit to correct detected gas pressure; iv. an input-output circuit of a set pressure; v. a comparison circuit comparing a temperature-corrected detection pressure from the temperature correction circuit and the set pressure from the input-output circuit; and vi. an output circuit that output a control signal proportional to a difference between the temperature-corrected detection pressure and the set pressure to the control valve; (e) a supply gas switching valve installed near the process chamber on a downstream side of the first gas distribution passage, wherein the supply gas switching valve opens the first gas distribution passage for a certain period of time so as to supply a set flow rate of the raw material gas to the process chamber; (f) a throttling unit provided on an inlet side of the supply gas switching valve, wherein the throttling unit regulates a flow rate of the raw material gas that is supplied to the process chamber to a predetermined flow rate value which is proportional to the set pressure; (g) a constant temperature heating device that heats the source tank, the first gas distribution passage, the supply gas switching valve and the throttling unit to a set temperature; and (h) a plurality of gas distribution passages for a plurality of different raw material gases provided in parallel to and independently from the first gas distribution passage for the raw material gas and supplying a set flow rate of desired different raw material gases separately to the process chamber, wherein each of the plurality of gas distribution passages is provided with a gas tank storing a desired different raw material gas, an automatic pressure regulator, a gas supply passage between the tank storing desired different raw material gas and the automatic pressure regulator, a throttling unit, a supply gas switching valve and a constant temperature heating device, wherein the raw material gas and the different raw material gases at the set flow rate are supplied to the process chamber separately through the each opened supply gas switching valve, while the supply pressures of the raw material gas in the first gas distribution passage and the different raw material gases in the plurality of gas distribution passages between a downstream side of the control valve of the automatic pressure regulator and the throttling unit are controlled to desired pressures by the automatic pressure regulators provided on the first gas distribution passage for the raw material gas and the plurality of gas distribution passages for different raw material gases; wherein the raw material gas that is supplied to the process chamber is supplied to the process chamber without a carrier gas.