Substrate processing apparatus, simulation apparatus, storage medium and simulation method

摘要

A substrate processing apparatus includes a substrate processing apparatus, including: a substrate processing chamber configured to accommodate a substrate and process the substrate; a piping coupled to the substrate processing chamber to allow a gas for processing the substrate to be introduced therethrough; and a simulation apparatus configured to simulate a path in which the gas for processing the substrate flows through the piping. The simulation apparatus includes: an information acquisition unit configured to acquire gas flow information defined by an operation mode in which the substrate is processed; a path determination unit configured to determine a gas path based on the gas flow information acquired by the information acquisition unit; and a simulation unit configured to simulate a flow of the gas by putting a color defined according to the type of gas on the gas path determined by the path determination unit.

主权项

1. A substrate processing apparatus, comprising:
a substrate processing chamber configured to accommodate a substrate and process the substrate; a piping coupled to the substrate processing chamber to allow a gas for processing the substrate to be introduced therethrough; and a simulator comprising:
a user interface through which an operation mode for processing the substrate is input by a user;a computer which includes:
a recipe memory that stores a gas flow information indicating a path of the gas through the piping based on the operation mode for processing the substrate;a gas definition information memory that stores a priority and a color indication for the gas based on a type of the gas;an information acquisition part that acquires the gas flow information corresponding to the operation mode input by the user through the user interface from the recipe memory;a path determination part that determines a gas path in a piping diagram based on the gas flow information acquired by the information acquisition part; anda simulation part that reads the priority and the color indication of the gas from the gas definition information memory, and simulates a flow of the gas through the piping by putting the color indication on the gas path in the piping diagram determined by the path determination part, wherein when different types of gases are combined at a joining section of the gas path, the simulation part designates the joining section with a color indication with a higher priority; anda display that displays the simulation result of the simulation part.