Method for manufacturing photo mask and photo mask manufactured with same

摘要

Disclosed are a method for manufacturing a photo mask and a photo mask manufactured with the method. The method includes (1) providing a partially finished photo mask, which has effective open areas and ineffective areas located around the effective open areas and (2) applying a half-etching process to form recesses in the ineffective areas. With the recesses formed through a half-etching process in the ineffective areas located around the effective open areas, a mass difference between the effective open areas and the ineffective areas is reduced so that in the process of attracting the photo mask, inconsistent sequence of attraction caused by a great mass difference between the effective open areas and the ineffective areas can be eliminated to thereby ensure that the effective open areas of the photo mask can be laid completely flat on a substrate at predetermined locations and thus ensure the preciseness of a deposited pattern.

主权项

1. A method for manufacturing a mask, comprising the following steps:
(1) providing a partially finished mask, wherein the partially finished mask is made of a material and comprises a plurality of effective open areas each of which comprises vapor deposition apertures formed therein in such a manner that the vapor deposition apertures are spaced from each other and extend, in a given direction, through a first part of the material of the partially finished mask that constitutes the effective open area to form hollow openings extending through the first part of the material for allowing a deposition material to pass therethrough and ineffective areas located around the effective open areas and comprising a second part of the material such that solid portions of the second part of the material are respectively located adjacent to the effective open areas; and (2) applying an etching process to partially remove the solid portions so as to form recesses in the ineffective areas, wherein the partial removal of the solid portions is such that the ineffective areas that have the same surface area as that of the effective open areas are made to have substantially the same mass as that of the effective open areas.