| 发明名称 |
TARGET FOR THE REACTIVE SPUTTER DEPOSITION OF ELECTRICALLY INSULATING LAYERS |
| 摘要 |
A target whose target surface is embodied so that the use of the target for reactive sputter deposition of electrically insulating layers in a coating chamber avoids a production of a spark discharge from the target surface to an anode that is situated in the coating chamber. |
| 申请公布号 |
HK1217976(A1) |
申请公布日期 |
2017.01.27 |
| 申请号 |
HK20160105957 |
申请日期 |
2016.05.25 |
| 申请人 |
OERLIKON SURFACE SOLUTIONS AG TRBBACH |
发明人 |
HAGMANN, Juerg;KRASSNITZER, Siegfried |
| 分类号 |
C23C;H01J |
主分类号 |
C23C |
| 代理机构 |
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