INTEGRATED MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED DRIVING STRUCTURE

摘要

An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

主权项

1. A MEMS gyroscope, comprising:
a first mass configured to move in a first direction along a first axis; a second mass configured to move in a second direction along a second axis, the second axis being transverse to the first axis; and a first elastic coupling element coupled to the first mass and the second mass, the first elastic coupling element being configured to move the second mass in the second direction in response to the first mass in the first direction.