| 摘要 |
A limiting current type gas sensor (1A) is provided with: a substrate (12); a microheater MH that is disposed on the substrate (12) with a first insulating layer (181) therebetween; a gas introducing path (51), which is disposed on the microheater MH with a second insulating layer (182) therebetween, and which takes in a gas to be measured; a lower electrode (28D) that is disposed on the gas introducing path (51); a solid electrolyte layer (30) that is disposed on the lower electrode (28D); an upper electrode (28U) that is disposed on a solid electrolyte layer (30) surface on the reverse side of the lower electrode (28D); and a cavity section C that is formed in the substrate (12), said cavity being substantially larger than the microheater MH. The limiting current type gas sensor wherein sensor characteristics are improved and more stabilized is provided. |
