发明名称 SURFACE ACOUSTIC WAVE DEVICE
摘要 A surface acoustic wave device includes a piezoelectric substrate, an IDT electrode that is provided on the piezoelectric substrate and includes combtooth-shaped electrode fingers, and a wiring electrode that is connected to the IDT electrode. A line width of the electrode fingers at a lower edge thereof and a line width of the electrode fingers at an upper edge thereof in a cross section of the electrode fingers that is perpendicular or substantially perpendicular to a longitudinal direction of the electrode fingers is smaller than a maximum line width of the electrode fingers.
申请公布号 US2017026026(A1) 申请公布日期 2017.01.26
申请号 US201615285536 申请日期 2016.10.05
申请人 Murata Manufacturing Co., Ltd. 发明人 TOYOTA Yuji
分类号 H03H9/02;H03H9/64 主分类号 H03H9/02
代理机构 代理人
主权项 1. A surface acoustic wave device comprising: a piezoelectric substrate; an IDT electrode that is provided on the piezoelectric substrate and includes combtooth-shaped electrode fingers; and a wiring electrode that is connected to the IDT electrode; wherein a line width at a lower edge and a line width at an upper edge in a cross section of each of the electrode fingers that is perpendicular or substantially perpendicular to a longitudinal direction of each of the electrode fingers, are smaller than a maximum line width of the electrode finger.
地址 Nagaokakyo-shi JP