ELECTRODE ASSEMBLY AND PLASMA SOURCE FOR GENERATING A NON-THERMAL PLASMA, AND METHOD FOR OPERATING A PLASMA SOURCE

摘要

The invention relates to an electrode assembly (5) for generating a non-thermal plasma, comprising a first electrode (7) and a second electrode (9) which are electrically insulated from each other by means of a dielectric element (11) and which are arranged at a distance from each other. The first electrode (7) has a thickness of at least 10 μm when seen in the direction of the distance between the electrodes (7, 9), and the second electrode (9) has a thickness of at least 1 μm to maximally 5 μm or a thickness of at least 5 μm to maximally 30 μm when seen in the direction of the distance between the electrodes (7, 9). The dielectric element (11) has a thickness of at least 10 μm to maximally 250 μm.