发明名称 METHOD FOR DETERMINING A BONDING CONNECTION IN A COMPONENT ARRANGEMENT AND TEST APPARATUS
摘要 The application relates to a method for determining a bonding connection (1) in a component arrangement (2), wherein the method has the following steps: producing a bonding connection (1) between a bonding section (3) of a bonding wire (4) and a metallic contact point (5), structuring a top-side surface of the bonding wire (4) in the region of the bonding section (3) and determining the bonding connection (1), wherein in this case a test voltage is applied to the bonding wire (4) and the bonding connection (1) so that the bonding connection (1) heats up owing to the current flow, generating a thermogram for the heated bonding connection (1) and determining whether the bonding connection (1) has been produced correctly by evaluating the thermogram. Furthermore, the application relates to a test apparatus for determining a bonding connection (1) in a component arrangement (2).
申请公布号 US2017025316(A1) 申请公布日期 2017.01.26
申请号 US201515125035 申请日期 2015.03.03
申请人 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. ;Technische Universität Berlin 发明人 MIDDENDORF Andreas;NOWAK Torsten;JANZEN Sergei
分类号 H01L21/66;H01L23/00 主分类号 H01L21/66
代理机构 代理人
主权项 1. A Method for determining a bonding connection in a component arrangement, wherein the method comprises the following steps: producing a bonding connection between a bonding section of a bonding wire and a metal contact point, structuring a top-side surface of the bonding wire in the region of the bonding section, and determining the bonding connection, wherein in this a test voltage is applied to the bonding wire and the bonding connection, so that the bonding connection heats up owing to the current flow,generating a thermogram for the heated bonding connection anddetermining whether the bonding connection has been produced correctly by evaluating the thermogram.
地址 München DE