发明名称 |
WAFER PROCESSING APPARATUS HAVING GAS INJECTOR |
摘要 |
A wafer processing apparatus may include a reaction tube extending in a vertical direction and defining a process chamber for receiving a boat that holds a plurality of wafers. A gas injector may be configured to supply a reaction gas into the process chamber and may include a gas distributor extending in the vertical direction in the reaction tube. The gas injector may have a plurality of ejection holes for spraying the reaction gas. An inner diameter of the gas distributor may be at least 10 mm, and a sectional area ratio of the total sectional area of the ejection holes to a sectional area of the gas distributor is about 0.3 or less. |
申请公布号 |
US2017022610(A1) |
申请公布日期 |
2017.01.26 |
申请号 |
US201615066318 |
申请日期 |
2016.03.10 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Seo Eun-Sung;Kim Yong-Kwon;Noh Young-Jin;Song Young-Chang;Choe Jae-Myung;Choi Ji-Hoon;HA Sang-Cheol |
分类号 |
C23C16/455;C23C16/44;C23C16/24 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
1. A wafer processing apparatus, comprising:
a reaction tube extending in a vertical direction and defining a process chamber for receiving a boat that holds a plurality of wafers; and a gas injector configured to supply a reaction gas into the process chamber, the gas injector comprising a gas distributor extending in the vertical direction in the reaction tube, the gas distributor having a plurality of ejection holes for spraying the reaction gas, wherein an inner diameter of the gas distributor is at least 10 mm, and a sectional area ratio of the total sectional area of the ejection holes to a sectional area of the gas distributor is about 0.3 or less. |
地址 |
Suwon-si KR |