发明名称 |
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS |
摘要 |
A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit forms plural and parallel images of one single electron source by deflecting plural beamlets of a parallel primary-electron beam therefrom, and one objective lens focuses the plural deflected beamlets onto a sample surface and forms plural probe spots thereon. A movable condenser lens is used to collimate the primary-electron beam and vary the currents of the plural probe spots, a pre-beamlet-forming means weakens the Coulomb effect of the primary-electron beam, and the source- conversion unit minimizes the sizes of the plural probe spots by minimizing and compensating the off-axis aberrations of the objective lens and condenser lens. |
申请公布号 |
WO2017015483(A1) |
申请公布日期 |
2017.01.26 |
申请号 |
WO2016US43375 |
申请日期 |
2016.07.21 |
申请人 |
HERMES MICROVISION INC.;REN, Weiming;LIU, Xuedong;XUERANG, Hu;ZHONGWEI, Chen |
发明人 |
REN, Weiming;LIU, Xuedong;XUERANG, Hu;ZHONGWEI, Chen |
分类号 |
G01N23/225;H01J37/10;H01J37/28 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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