发明名称 POLISHING PAD AND POLISHING METHOD
摘要 Provided is a polishing pad capable, when polishing an object to be polished that has a protrusion and/or recess on the surface, of adequately polishing the parts near the protrusion or the inner surface of the recess on the surface of the object being polished. The polishing pad has a raised nap section (1) in which multiple fibers (12) of at least 2 mm length are raised on the surface of a base (11), and the mass of the fibers (12) is at least 250 g/m2. Said polishing pad is used for polishing an object (2) to be polished that contains metal, alloy or metal oxide material and has a protrusion (21) and/or a recess (22) on the surface.
申请公布号 WO2017013935(A1) 申请公布日期 2017.01.26
申请号 WO2016JP64775 申请日期 2016.05.18
申请人 FUJIMI INCORPORATED 发明人 MORINAGA Hitoshi;TAMAI Kazusei;TAHARA Muneaki;ASAI Maiko;ITO Yuuichi
分类号 B24B37/24;B24B37/00 主分类号 B24B37/24
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