发明名称 |
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY |
摘要 |
A method involving a radiation intensity distribution for a target measured using an optical component at a gap from the target, the method including: determining a value of a parameter of interest using the measured radiation intensity distribution and a mathematical model describing the target, the model including an effective medium approximation for roughness of a surface of the optical component or a part thereof. |
申请公布号 |
WO2017012857(A1) |
申请公布日期 |
2017.01.26 |
申请号 |
WO2016EP65786 |
申请日期 |
2016.07.05 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
VAN DER POST, Sietse, Thijmen;ZIJP, Ferry;ROOBOL, Sander, Bas |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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