PASSIVE DETECTORS FOR IMAGING SYSTEMS

摘要

Passive detector structures for imaging systems are provided, which are based on a coefficient of thermal expansion (CTE) framework. For example, an imaging device includes a substrate, and a photon detector disposed over a surface of the substrate. The photon detector comprises a stack of thin film layers including a resonator member and an unpowered detector member. The resonator member generates an output signal having a frequency or period of oscillation. The unpowered detector member has a CTE, which causes the unpowered detector member to expand or contract due to thermal heating resulting from photon exposure, and apply a mechanical force to the resonator member. The mechanical force causes a change in the frequency or period of oscillation of the output signal generated by the resonator member, wherein the change in the frequency or period of oscillation is utilized to determine an amount of photon exposure of the photon detector.

主权项

1. An imaging device, comprising:
a substrate; a photon detector disposed over a surface of the substrate, wherein the photon detector comprises a stack of thin film layers, wherein the thin film layers comprise:
a resonator member configured to generate an output signal having a frequency or period of oscillation;an unpowered detector member, wherein the unpowered detector member is configured for photon exposure, wherein the unpowered detector member comprises a material having a thermal coefficient of expansion that causes the unpowered detector member to distort due to said photon exposure, wherein the unpowered detector member is further configured to apply a mechanical force to the resonator member due to said distortion of the unpowered detector member, and cause a change in the frequency or period of oscillation of the output signal generated by the resonator member due to said mechanical force applied to the resonator member; anda thermal insulating member configured to thermally insulate the resonator member from the unpowered detector member; and digital circuitry configured to (i) determine the frequency or period of oscillation of the output signal generated by the resonator member as a result of the mechanical force applied to the resonator member by the unpowered detector member, and to (ii) determine an amount of said photon exposure based on the determined frequency or period of oscillation of the output signal generated by the resonator member.