| 发明名称 |
MICROCHANNEL RESONATOR AND METHOD FOR MANUFACTURING SAME |
| 摘要 |
Provided is a method for manufacturing a microchannel resonator capable of measuring a mass and characteristics of an object using a principle in which a resonance frequency is changed according to a mass of a moving material, the method including: providing a silicon substrate; forming a cavity channel inside the silicon substrate; forming a hollow silicon oxide structure on the inner wall surface of the cavity channel by oxidizing the inner wall surface of the cavity channel; and partially removing the periphery of the hollow silicon oxide structure such that the hollow silicon oxide structure can resonate with respect to the silicon substrate. |
| 申请公布号 |
US2017022052(A1) |
申请公布日期 |
2017.01.26 |
| 申请号 |
US201415125070 |
申请日期 |
2014.10.13 |
| 申请人 |
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY |
发明人 |
LEE Jung Chul;KIM Joo Hyun |
| 分类号 |
B81C1/00;G01N29/02;G01N29/036;G01N5/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for manufacturing a microchannel resonator capable of measuring a mass and characteristics of an object using a principle in which a resonance frequency is changed according to a mass of a moving material, the method comprising:
providing a silicon substrate; forming a cavity channel inside the silicon substrate; forming a hollow silicon oxide structure on the inner wall surface of the cavity channel by oxidizing the inner wall surface of the cavity channel; and partially removing the periphery of the hollow silicon oxide structure such that the hollow silicon oxide structure resonates with respect to the silicon substrate. |
| 地址 |
Seoul KR |
