发明名称 WET ETCHING METHOD AND ETCHING SOLUTION
摘要 A wet etching method for etching a metal-containing film on a substrate using an etching solution, wherein the wet etching method is characterized in that the etching solution is an organic solvent solution of a β-diketone in which a trifluoromethyl group and a carbonyl group are bonded, and the metal-containing film contains a metal element capable of forming a complex with the β-diketone.
申请公布号 WO2017013988(A1) 申请公布日期 2017.01.26
申请号 WO2016JP68456 申请日期 2016.06.22
申请人 CENTRAL GLASS COMPANY, LIMITED 发明人 YAO, Akifumi;YAMAUCHI, Kunihiro;FUJIWARA, Masaki;MIYAZAKI, Tatsuo
分类号 H01L21/308;C23F1/10 主分类号 H01L21/308
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