| 摘要 |
The invention relates to a production method for a micromechanical window structure, comprising the following steps: providing a substrate (1), wherein the substrate (1) has a front side (4) and a rear side (5); forming a first recess (6) on the front side (4); forming a coating (8; 8', 8") on the front side (4) and on the first recess (6); and forming a second recess (7) on the rear side (5) such that the coating (8) is exposed at least in some regions, whereby a window (F) is formed by the exposed region of the coatings. |
