发明名称 |
SHAPING OF CONTACT STRUCTURES FOR SEMICONDUCTOR TEST, AND ASSOCIATED SYSTEMS AND METHODS |
摘要 |
Systems and methods for testing semiconductor wafers using a wafer translator are disclosed herein. In one embodiment, an apparatus for adjusting a wafer translator for testing semiconductor dies includes the semiconductor wafer translator having a wafer translator substrate with a wafer-side configured to face the dies. A plurality of wafer-side contact structures is carried by the wafer-side of the wafer translator. The apparatus also includes a shaping wafer having a shaping wafer substrate, and a plurality of cavities in the shaping wafer substrate. The wafer-side contact structures are shaped by contacting surfaces of the cavities of the shaping wafer substrate. |
申请公布号 |
US2017023617(A1) |
申请公布日期 |
2017.01.26 |
申请号 |
US201615178747 |
申请日期 |
2016.06.10 |
申请人 |
Translarity, Inc. |
发明人 |
Ruffler Jens;Preston Douglas A.;Lane Christopher T.;Aitken Thomas |
分类号 |
G01R1/073;H01L23/00;G01R31/26;H01L21/683 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
1. An apparatus for adjusting a wafer translator for testing semiconductor dies, comprising:
the semiconductor wafer translator comprising:
a wafer translator substrate having a wafer-side configured to face the dies, and an inquiry-side facing away from the wafer-side, anda plurality of wafer-side contact structures carried by the wafer-side of the wafer translator; and a shaping wafer comprising:
a shaping wafer substrate, anda plurality of cavities in the shaping wafer substrate, wherein individual cavities face individual wafer-side contact structures, and wherein the wafer-side contact structures are shaped by contacting surfaces of the cavities of the shaping wafer substrate. |
地址 |
Fremont CA US |