发明名称 SHAPING OF CONTACT STRUCTURES FOR SEMICONDUCTOR TEST, AND ASSOCIATED SYSTEMS AND METHODS
摘要 Systems and methods for testing semiconductor wafers using a wafer translator are disclosed herein. In one embodiment, an apparatus for adjusting a wafer translator for testing semiconductor dies includes the semiconductor wafer translator having a wafer translator substrate with a wafer-side configured to face the dies. A plurality of wafer-side contact structures is carried by the wafer-side of the wafer translator. The apparatus also includes a shaping wafer having a shaping wafer substrate, and a plurality of cavities in the shaping wafer substrate. The wafer-side contact structures are shaped by contacting surfaces of the cavities of the shaping wafer substrate.
申请公布号 US2017023617(A1) 申请公布日期 2017.01.26
申请号 US201615178747 申请日期 2016.06.10
申请人 Translarity, Inc. 发明人 Ruffler Jens;Preston Douglas A.;Lane Christopher T.;Aitken Thomas
分类号 G01R1/073;H01L23/00;G01R31/26;H01L21/683 主分类号 G01R1/073
代理机构 代理人
主权项 1. An apparatus for adjusting a wafer translator for testing semiconductor dies, comprising: the semiconductor wafer translator comprising: a wafer translator substrate having a wafer-side configured to face the dies, and an inquiry-side facing away from the wafer-side, anda plurality of wafer-side contact structures carried by the wafer-side of the wafer translator; and a shaping wafer comprising: a shaping wafer substrate, anda plurality of cavities in the shaping wafer substrate, wherein individual cavities face individual wafer-side contact structures, and wherein the wafer-side contact structures are shaped by contacting surfaces of the cavities of the shaping wafer substrate.
地址 Fremont CA US