发明名称 ENCODER DEVICE, DRIVE DEVICE, STAGE DEVICE, ROBOT DEVICE, AND INFORMATION ACQUISITION METHOD
摘要 [Problem] To provide an encoder device capable of accurately acquiring rotation information. [Solution] An encoder device (EC) is provided with: an image pickup unit (7) that picks up an image of a mark (4) of which the direction changes due to rotation of a rotating shaft, said mark including at least one line; and a processing unit (8) that calculates rotation information of the rotating shaft using the direction of the mark, said direction having been obtained on the basis of an image pickup result of the image pickup unit.
申请公布号 WO2017014142(A1) 申请公布日期 2017.01.26
申请号 WO2016JP70820 申请日期 2016.07.14
申请人 NIKON CORPORATION 发明人 MORITA, Toru
分类号 G01D5/26;G01B11/26;G01D5/347 主分类号 G01D5/26
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