LOW-PRESSURE CHAMBER PROVIDING PRESET AIR PRESSURE

摘要

Provided is a method for maintaining a preset air pressure of a low-pressure chamber. The method may comprise the steps of: measuring the inside air pressure of a low-pressure chamber; if the difference between the inside air pressure and a preset air pressure is the same or higher than a threshold value, adjusting the inside temperature of the low-pressure chamber by using a thermal conduction part disposed inside the low-pressure chamber; and by using a getter, making the difference to be below the threshold value by adsorbing or releasing molecules inside the low-pressure chamber according to the adjustment of the temperature.