| 摘要 |
[Problem] To provide a shape measuring device that is capable of detecting, in a highly accurate manner, the relative position and orientation errors of an optical probe and stage, and measuring, in a highly accurate manner, the shape of a workpiece. [Solution] This shape measuring device comprises: a stage (10) having a mounting surface (11) upon which a workpiece (W) is mounted; an optical probe (20) for measuring the shape of the workpiece (W) mounted on the mounting surface (11), said optical probe having an orthogonal surface (21) that is orthogonal to an optical axis (L); a reference member (50) having a reference surface (51) that faces the mounting surface (11); first sensors (52, 53, 54) for detecting the slope of the mounting surface (11) relative to the reference surface (51), and the distance from the reference surface (51) to the mounting surface (11); and second sensors (55, 56, 57) for detecting the slope of the orthogonal surface (21) relative to the reference surface (51), and the distance from the reference surface (51) to the orthogonal surface (21). |
