发明名称 試験装置、試験方法
摘要 A test apparatus includes a foreign matter removal unit having a first slope provided with an abrasive coating or an adhesive sheet and a second slope provided with an abrasive coating or an adhesive sheet, the second slope facing the first slope in such a manner that an upper end of the second slope is spaced from an upper end of the first slope a greater distance than a lower end of the second slope is spaced from a lower end of the first slope, a test unit for testing electrical characteristics of a semiconductor chip, and a transfer unit for holding and releasing the semiconductor chip at a position above the first and second slopes and transferring the semiconductor chip to the test unit.
申请公布号 JP6064831(B2) 申请公布日期 2017.01.25
申请号 JP20130165108 申请日期 2013.08.08
申请人 三菱電機株式会社 发明人 岡田 章;野口 貴也;竹迫 憲浩;山下 欽也;秋山 肇
分类号 G01R31/26 主分类号 G01R31/26
代理机构 代理人
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